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Mass Flow Series
Micro Thermal Gas Mass Flowmeter
Micro Thermal Gas Mass Flowmeter
Micro Thermal Gas Mass Flowmeter
Micro-thermal Gas Mass Flow Meter (MEMS)
Model: MEMS
The micro-thermal gas mass flow meter utilizes MEMS silicon micromachining sensors to measure small/minor gas flows. It offers high reliability, excellent repeatability, low pressure loss, no moving parts, and no need for temperature and pressure compensation. Ideal for light industry, chemical, environmental protection, and semiconductor industries.
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