Micro-thermal Gas Mass Flow Meter (MEMS)
Micro-thermal Gas Mass Flow Meter (MEMS)
The micro-thermal gas mass flow meter utilizes MEMS silicon micromachining sensors to measure small/minor gas flows. It offers high reliability, excellent repeatability, low pressure loss, no moving parts, and no need for temperature and pressure compensation. Ideal for light industry, chemical, environmental protection, and semiconductor industries.
- MEMS silicon micromachining sensor, high sensitivity for micro-flow measurement
- High reliability, excellent repeatability, low pressure loss, no moving parts
- Wide turndown ratio, fast response, no need for temperature and pressure compensation
- Integrates instantaneous/total flow display and signal output
- Supports automatic regulation and valve control
- Can replace float flow meters and orifice plate flow meters
Overview
Product Overview
This product employs MEMS flow sensor with silicon micromachining technology, featuring advantages in measuring small and micro flows. It is a gas mass flow meter and flow controller, mainly used for detection and control of gases such as air, oxygen, argon, nitrogen in light industry, chemical, environmental protection, and semiconductor sectors. It can replace float flow meters and orifice plate flow meters.
Features
The μf micro-flow thermal sensor utilizes large-scale integrated circuit and material processing technologies, significantly improving micro-flow measurement sensitivity. It integrates instantaneous flow display, cumulative flow display, and signal output, while enabling automatic regulation and valve control.
Specifications
| Measurement Principle | MEMS Thermal Mass |
| Applicable Medium | Air, Oxygen, Argon, Nitrogen, etc. |
| Application Range | Micro and Small Flow |
| Range Ratio | Wide |
| Temperature/Pressure Compensation | Not required |
| Integrated Functions | Display + Output + Valve Control |
| Output Signal | 4–20mA / RS485 |
| Features | Low pressure drop, fast response, no moving parts |